Apparatus for and method of transferring substrates

ABSTRACT

A substrate transfer apparatus capable of preventing contaminants from sticking to a substrate again when the substrate is unloaded, wherein a first support member and a second support member are provided on an arm, the first support member supporting the substrate when the substrate is loaded into a processing machine and the second support member supporting the substrate when the substrate is unloaded from the processing machine.

This application is a division of and claims benefit of priority under35 U.S.C. § 120 for U.S. Ser. No. 09/676,496, filed Oct. 2, 2000 (nowU.S. Pat. No. 6,837,672, issued Jan. 4, 2005) and Ser. No. 09/075,927,filed May 12, 1998 (now U.S. Pat. No. 6,152,677, issued Nov. 28, 2000),the contents of which are herein incorporated in their entirety. Thisapplication also claims priority under 35 U.S.C. § 119 for Japan9-139143, filed May 15, 1997.

BACKGROUND OF THE INVENTION

This invention relates to an apparatus for and method of transferringsubstrates, such as semiconductor wafers or LCD (Liquid-Crystal Display)glass substrates, between a cassette and a processing section.

In general, photolithography has been used to form circuit or electrodepatterns on a substrate, such as a glass substrate, in the manufactureof liquid-crystal displays (LCDs). In photolithography, a series ofprocesses is performed. The processes include cleaning a substrate,drying the substrate, forming a resist film on the substrate, exposingthe resist film, and developing the resist film. In the processing unitswhich carry out the processes, a substrate taken out of a cassette in acassette station and placed on an arm is transferred to the processingsections, which subject the substrate to a series of processes,including the cleaning of the substrate. The substrate passed throughthe processing sections is put on the arm again and returned to thecassette.

At the top face of the arm, for example, when the section that supportsthe substrate before cleaning is the same as the section that supportsthe substrate after the cleaning, the following problem arises: thecontaminants on the back of the substrate stick to the support membervia the top face of the arm when the uncleaned substrate is put on thearm, which permits the contaminants to stick to the back of the cleanedsubstrate again when the cleaned substrate is placed on the arm andtransferred. As means for solving the problem, a substrate transferapparatus has been disclosed in, for example, Jpn. Pat. Appln. KOKAIPublication No. 5-152266. With the substrate transfer apparatus in Jpn.Pat. Appln. KOKAI Publication No. 5-152266, a substrate takeout armwhich takes an uncleaned substrate out of a cassette and transfers it tothe cleaning section is constructed of one unit and a cleaned-substratestorage arm which returns the substrate cleaned in the cleaning sectionto the cassette is constructed of a separate unit. This preventscontaminants from sticking to the substrate again.

With the substrate takeout arm and cleaned substrate storage arm beingconstructed of separate units, however, the substrate transfer apparatushas disadvantages in that it requires the takeout arm and storage armseparately and that the driving unit for switching between the takeoutarm and storage arm is relatively large and therefore the configurationis complicated. Furthermore, there is another problem: the turning ofthe entire arm accompanying the switching action requires asubstantially wide space, which prevents effective use of the apparatusinstallation space.

BRIEF SUMMARY OF THE INVENTION

The object of the present invention is to provide a substrate transferapparatus with a simple configuration capable of reliably preventingcontaminants from sticking to a substrate again and a method oftransferring substrates which features the same effect.

According to the present invention, there is provided a substratetransfer apparatus comprising an arm having a top face on which asubstrate is placed and first and second support means for selectivelysupporting the substrate, and a driving section for moving the arm toload and unload the substrate into and from a processing machine, withthe substrate kept on the arm.

With the substrate transfer apparatus, when an unprocessed substrate isunloaded from a cassette and transferred to the processing section, forexample, the first support members are used support the bottom surfaceof the substrate, whereas when the substrate processed in the processingsection is returned to the cassette, the second support members are usedto support the bottom surface of the substrate. In this way,contaminants are easily prevented from sticking to the substrate againby causing one support member to support the unprocessed substrate andthe other support member to support the processed substrate on the samearm.

According to the present invention, there is provided a substratetransfer apparatus comprising an arm having a top face on which asubstrate is placed and first and second support means for selectivelyexpanding outward to support the substrate, and a pressure adjustingsection for selectively causing the first support means and the secondsupport means to expand outward, and a driving section for moving thearm to load and unload the substrate into and from a processing machine,with the substrate kept on the arm.

According to the present invention, there is provided a substratetransfer apparatus comprising an arm having a top face on which asubstrate is placed, first and second suction pads which are provided onthe top face of the arm in such a manner that they can go up and downfreely to selectively suck the substrate, a lift unit for selectivelyraising and lowering the first and second suction pads, and a drivingsection for moving the arm to load and unload the substrate into andfrom a processing machine, with the substrate kept on the arm.

According to the present invention, there is provided a substratetransfer method comprising providing first and second support membersfor selectively supporting a substrate on the top face of an arm onwhich the substrate is placed, causing only the first support members tosupport the substrate and loading the substrate into a processingsection, and causing only the second support members to support thesubstrate and unloading the substrate from the processing section.

With the present invention, it is possible to cause the first supportmembers to support the unprocessed substrate and the second supportmembers to support the processed substrate by switching the supportmembers without moving the arm itself. This enables the relativelysimple substrate transfer apparatus to positively solve the problem ofcontaminants sticking to the processed substrate again. The compactdesign of the substrate transfer apparatus makes it possible to madeeffective use of the space.

Additional objects and advantages of the invention will be set forth inthe description which follows, and in part will be obvious from thedescription, or may be learned by practice of the invention. The objectsand advantages of the invention may be realized and obtained by means ofthe instrumentalities and combinations particularly pointed outhereinbefore.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate presently preferred embodiments ofthe invention, and together with the general description given above andthe detailed description of the preferred embodiments given below, serveto explain the principles of the invention.

FIG. 1 is a plan view of a cleaning machine;

FIG. 2 is a perspective view of a substrate transfer apparatus accordingto an embodiment of the present invention;

FIG. 3 is a perspective view of an arm suitable for transferring asubstrate, such as a semiconductor wafer;

FIG. 4 is a perspective view of an arm suitable for transferring asubstrate, such as an LCD glass substrate;

FIG. 5 is a sectional view of an arm where a fluid reservoir acting as apressure adjusting section is provided below each of a first supportmember and a second support member;

FIG. 6 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 5;

FIG. 7 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 5;

FIG. 8 is a sectional view of an arm where a fluid reservoir acting as apressure adjusting section is provided below each of a first supportmember and a second support member, which are each constructed of apiston capable of moving up and down;

FIG. 9 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 8;

FIG. 10 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 8;

FIG. 11 is a sectional view of an arm where a fluid reservoir acting asa pressure adjusting section is provided below each of a first supportmember and a second support member, which are each constructed of abag-like expanding member;

FIG. 12 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 11;

FIG. 13 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 11;

FIG. 14 is a perspective view of an embodiment where a first suction padand a second suction pad are supported by a lift unit;

FIG. 15 is a sectional view of an embodiment where a cylinder is used asa lift unit;

FIG. 16 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 15;

FIG. 17 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 15;

FIG. 18 is a sectional view of an arm using, as the lift unit, bagmembers that expand from the supply of fluid to raise the first suctionpad and second suction pad;

FIG. 19 is a perspective view of one bag member;

FIG. 20 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 18;

FIG. 21 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 18;

FIG. 22 is a sectional view of an arm using, as the lift unit, strapmembers that are strained to raise the first suction pad and secondsuction pad;

FIG. 23 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 22;

FIG. 24 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 22;

FIG. 25 is a sectional view of an arm using, the lift unit, a beltinserted below the first suction pad and second suction pad;

FIG. 26 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 23;

FIG. 27 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 23;

FIG. 28 is a sectional view of an arm where a seesaw-like rocking memberis provided in three or more places on the top face of the arm and afirst suction pad is installed on one end of the rocking member and asecond pad is installed on the other end of the rocking member;

FIG. 29 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 28;

FIG. 30 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 28;

FIG. 31 is a sectional view of an arm where a rocking member is rockedby the pull strength of a spring and a wedge member fitted under thebottom surface of the other side of the rocking member;

FIG. 32 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 31;

FIG. 33 is a sectional view of an arm where a seesaw-like rocking memberis provided on the top face of the arm and a first support member isinstalled at one end of the rocking member and a second support memberis installed at the other end of the rocking member;

FIG. 34 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 33;

FIG. 35 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 33;

FIG. 36 is a sectional view of an arm where one of the first supportmember and second support member on the top face of the arm is designedto move up and down freely;

FIG. 37 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the embodiment of FIG. 36;

FIG. 38 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the embodiment of FIG. 36;

FIG. 39 is a sectional view of an arm according to a modification of theembodiment of FIG. 36;

FIG. 40 is a sectional view to help explain a state where a cleanedsubstrate is transferred in the modification of FIG. 39;

FIG. 41 is a sectional view of an arm according to another modificationof the embodiment of FIG. 36; and

FIG. 42 is a sectional view to help explain a state where an uncleanedsubstrate is transferred in the modification of FIG. 41.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, preferable embodiments of the present invention will beexplained using a cleaning machine 1 which cleans a substrate W, anobject to be processed. FIG. 1 is a plan view of a cleaning machine forcleaning a substrate W, such as a semiconductor wafer or an LCD glasssubstrate. The cleaning machine 1 is provided with a substrate transferapparatus 2 according to an embodiment of the present invention. On bothsides of the substrate transfer apparatus 2, a cassette station 3 and acleaning section 4 are provided in such manner that they face eachother.

On the cassette station 3, cassettes C loaded by a transfer robot (notshown) are placed. Each cassette C houses substrates W, with thesubstrates arranged horizontally in parallel with each other at specificintervals. The substrates W are, for example, disk-like semiconductorwafers or rectangular LCD glass substrates.

In the middle of a cleaning section 4, a transfer path 10 is formed. Amain transfer arm 11 is designed to move along the transfer path 10. InFIG. 1, on one side of the transfer path 10, there are provided scrubberunits 15 and 16 for cleaning a substrate W by scrubbers using variousagent solutions, such as demineralized water, ammonia water, hydrogenperoxide solution, and hydrogen fluoride solution. On the other side ofthe transfer path 10, there are provided drying units 12, 13, and 14 fordrying the substrate W. As the main transfer arm 11 moves along thetransfer path 10, it transfers the substrate W to the individual units12 to 16 in specific order, thereby subjecting the substrate to eachcleaning process.

The substrate transfer apparatus 2 includes an arm 21 provided on thefront of a base 20. As described below, in the substrate transferapparatus 2, the base 20 is designed to move in the directions of X andY shown in FIG. 1, go up and down vertically, and rotate on a verticalaxis. As the base 20 moves, an uncleaned substrate W is taken out of acassette C on the cassette station 3, put on the arm 21, andtransferred. The substrate W is delivered to the main transfer arm 11 ofthe cleaning section 4. At the same time, a substrate W already cleanedat the cleaning section 4 is received from the main transfer arm 11 andput on the arm 21. Then, the substrate W is transferred and returned tothe cassette C on the cassette station 3.

The base 20 is supported by an advance/retreat unit 22 for advancing andretreating the arm 21 with respect to the cassette C by moving the base20 horizontally along the X-axis in the posture of FIG. 2, a rotate/liftunit for causing the arm 21 to rotate and go up and down by supportingthe bottom of the advance/retreat unit 22 in such a manner that the unit22 can rotate and go up and down freely, and a lateral movement unit 25for moving the arm 21 in a lateral direction by supporting the lowerpart of the rotate/lift unit and moving along a rail 24 provided in thedirection of Y-axis. With the advance/retreat unit 22, a rotation/liftunit 23, and a lateral movement unit 25 moving in cooperation with eachother, the arm 21 is raised while it is kept inserted in the cassette Cplaced on the cassette station 3, thereby taking an uncleaned substrateW out of the cassette C. The taken-out substrate W is put on the arm 21and transferred to the main transfer arm 11 of the cleaning section 4standing by at the back of the substrate transfer apparatus 2. When asubstrate W already cleaned at the cleaning section 4 is returned to thecassette C, the main transfer arm 11 places the substrate W on the arm21. Thereafter, the substrate W is transferred while being kept on thearm 21 and is returned to the cassette C on the cassette station 3. Onthe top face of the arm 21, first support members 31 and second supportmembers 32 are provided in at least three or more places. A concretestructure will be explained later. The first support member 31 andsecond support member 32 are designed to switch between a state whereonly the first support members 31 support support the bottom surface ofthe substrate W at the top face of the arm 21 without permitting thesecond support members 32 to touch the substrate and a state where onlythe second support members 32 support the bottom surface of thesubstrate W at the top face of the arm 21 without permitting the firstsupport members 31 to touch the substrate.

FIG. 3 is a perspective view of an arm 21 suitable for transferring asubstrate W, such as a disk-like semiconductor wafer. As shown in FIG.3, the arm 21 is constructed of a single plate member 35 provided on thefront of the base 20. On the top of the plate member 35, a set of thefirst support members 31 and the second support members 32 are placed inthree places. Guides 36 and 37 for positioning the periphery of asubstrate W, such as a semiconductor wafer, are provided at the tip endand neck end of the plate member 35, respectively. The arm 21 isconstructed in such a manner that it can switch between a state whereonly the first support members 31 support, at the top of the platemember 35, the bottom surface of the substrate W positioned between theguides 36 and 37 and a state where only the second support members 32support the bottom surface of the substrate W.

FIG. 4 shows an arm 21 suitable for transferring a substrate W, such asa rectangular LCD glass substrate. As in the figure, the arm 21 has twoarm members 38 provided on the front of the base 20. On the top of eachplate member 38, a set of the first support members 31 and the secondsupport members 32 are placed in three places. That is, a total of sixsets of the first and second support members are provided. On the top ofthe two arm members 38, the state where only the first support members31 support the bottom surface of the substrate W is switched to thestate where only the second support members 32 support the bottomsurface of the substrate W or vice versa.

As described above, the shape of the arm 21 can be constructed of, forexample, a single plate member 35 or two arm members 38. A set of thefirst support member 31 and second support member 32 has only to beprovided in at least three or more places on the top face of the arm 21so that the bottom surface of the substrate W may be supported stably.

In the cleaning machine 1 of FIG. 1, the cassette C loaded by thetransfer robot is placed on the cassette station 3. In the cassette C,uncleaned substrates W are arranged in parallel at more than one stage.

Then, the arm 21 of the substrate transfer apparatus 2 starts to take asubstrate W out of the cassette C. To take an uncleaned substrate W outof the cassette C, the arm 21 is brought into a state where only thefirst support member 31 can support the bottom surface of the substrateW at the top face of the arm 21. With the advance/retreat unit 22,rotate/lift unit 23, and lateral movement unit 25 moving in cooperationwith each other as explained in FIG. 2, the arm 21 is moved and insertedinto the cassette C on the cassette station 3 and then is raised. Thiscauses only the first support members 31 to support the bottom surfaceof the substrate W housed in the cassette C. The arm 21 then receivesthe substrate W as if to scoop the substrate from below. The substrate Wreceived on the arm 21 this way is taken out of the cassette C.

With the bottom surface of the substrate W taken out this way beingsupported by only the first support members 31 above the arm 21, thecooperative action of the advance/retreat unit 22, rotate/lift unit 23,and lateral movement unit 25 transfers the substrate W and delivers itto the main transfer arm 11 of the cleaning section 4 standing by at theback of the substrate transfer apparatus 2. The movement of the maintransfer arm 11 transfers the delivered substrate W to each of the units12 to 16 in the cleaning section 4 in specific order. The units subjectthe substrate W to various cleaning processes. After the subject W hasbeen cleaned in the cleaning section 4, it is placed on the maintransfer arm 11 of the cleaning section 4 and brought into the standbystate at the back of the substrate transfer apparatus 2.

To return the substrate W cleaned at the cleaning section 4 to thecassette C, the arm 21 is brought into a state where only the secondsupport members 32 supports the bottom surface of the substrate W at thetop face of the arm 21. The cooperative action of the advance/retreatunit 22, rotate/lift unit 23, and lateral movement unit 25 moves the arm21 and positions it below the substrate W on the main transfer arm 11standing by at the back of the substrate transfer apparatus 2.Thereafter, the arm 21 is raised. In this way, the bottom surface of thesubstrate W on the main transfer arm 11 is supported by only the secondsupport member 32. Then, the substrate W is scooped from below anddelivered onto the arm 21.

The cooperative action of the advance/retreat unit 22, rotate/lift unit23, and lateral movement unit 25 moves the art 21, thereby transferringthe substrate W on the arm 21, which returns the substrate W to thecassette C.

After all the substrates W in the cassette C have been cleaned by therepetition of the aforementioned processes, the transfer robot unloadsthe cassette C from the cassette station 3.

As described above, with the substrate transfer apparatus 2, when asubstrate W is transferred between a cassette C on the cassette station3 and the main transfer arm 11 of the cleaning section 11, an uncleanedsubstrate W is supported by only the first support members 31 and thecleaned substrate W is supported by only the second support members 32.Therefore, even if contaminants on the bottom surface of the uncleanedsubstrate W stick to the first support members 31, there is no fear thatthey will stick again to the cleaned substrate W. Furthermore, in thesubstrate transfer apparatus 2, even when an uncleaned substrate W issupported by only the second support members 32 and transferred from thecassette C to the main transfer arm 11 and the cleaned substrate W issupported by only the first support members 31 and transferred from themain transfer arm 11 to the cassette C, contaminants will be similarlyprevented from sticking to the substrate again.

Hereinafter, a concrete configuration of the first support members 31and second support members 32 will be explained. They are used suitablyin the substrate transfer apparatus 2 of the present invention.

FIGS. 5, 8, and 11 show embodiments in each of which fluid reservoirs 53and 54 acting as pressure adjusting sections are provided below a firstsupport member 51 and second support member 52 located on the top faceof the arm 21, respectively. In FIGS. 5, 8, and 11, although only onefirst support member 51 and only one second support member 52 are shownto simplify the explanation, at least three sets of the first supportmember 51 and the second support member 52 are provided on the top faceof the arm 21.

The first support member 51 and second support member 52 in FIG. 5 areconstructed by the top ends of bellows-like elastic cases 55 and 56,respectively. The arm 21 is constructed in such a manner that fluid,such as air, can be supplied via circuits 57 and 58 to the fluidreservoirs 53 and 54 serving as pressure adjusting sections in theelastic cases 55 and 56. In this case, the fluid is selectively sentfrom, for example, a pump 59 provided in the base 20 to the circuit 57or 58.

With such a configuration, when an uncleaned substrate W is transferredwhile being kept on the arm 21, the supply of the fluid via the circuit57 to the fluid reservoir 53 causes the elastic case 55 to expandupward, making the first support member 51 higher than the secondsupport member 52 as shown in FIG. 6. As a result, the bottom surface ofthe substrate W is supported by only the first support member 51. Whenthe cleaned substrate W is transferred, the supply of the fluid via thecircuit 58 to the fluid reservoir 54 causes the elastic case 56 toexpand upward, making the second support member 52 higher than the firstsupport member 51, as shown in FIG. 7. As a result, the bottom surfaceof the substrate W is supported by only the second support member 52.

The first support member 51 and second support member 52 in FIG. 8 areconstructed by the top ends of vertical-movement pistons 60 and 61,respectively. The arm 21 is constructed in such a manner that fluid,such as air, can be supplied via circuits 57 and 58 to the fluidreservoirs 53 and 54 serving as pressure adjusting sections formed atthe lower ends of the pistons 60 and 61. With such a configuration, whenan uncleaned substrate W is transferred while being kept on the arm 21,the supply of the fluid via the circuit 57 to the fluid reservoir 53causes the piston 60 to rise, making the first support member 51 higherthan the second support member 52 as shown in FIG. 9. As a result, thebottom surface of the substrate W is supported by only the first supportmember 51. When the cleaned substrate W is transferred, the supply ofthe fluid via the circuit 58 to the fluid reservoir 54 causes the piston61 to rise, making the second support member 52 higher than the firstsupport member 51, as shown in FIG. 10. As a result, the bottom surfaceof the substrate W is supported by only the second support member 52.

The first support member 51 and second support member 52 in FIG. 11 areconstructed by the top ends of bag-like expanding members 65 and 66provided on the top face of the arm 21, respectively. The arm 21 isconstructed in such a manner that fluid, such as air, can be suppliedvia circuits 57 and 58 to the fluid reservoirs 53 and 54 serving aspressure adjusting sections in the expanding members 65 and 66. Withsuch a configuration, when an uncleaned substrate W is transferred whilebeing kept on the arm 21, the supply of the fluid via the circuit 57 tothe fluid reservoir 53 causes the expanding member 65 to expand upward,making the first support member 51 higher than the second support member52 as shown in FIG. 12. As a result, the bottom surface of the substrateW is supported by only the first support member 51. When the cleanedsubstrate W is transferred, the supply of the fluid via the circuit 58to the fluid reservoir 54 causes the expanding member 66 to expandupward, making the second support member 52 higher than the firstsupport member 51, as shown in FIG. 15. As a result, the bottom surfaceof the substrate W is supported by only the second support member 52.

With the embodiments shown in FIGS. 5, 8, and 11, too, the contaminantsstuck from the uncleaned substrate W to the first support member 51 areprevented from sticking to the cleaned Substrate W again by switchingthe support member that supports the bottom surface of the substrate Wfrom the first support member 51 to the second support member 52 afterthe cleaning. An uncleaned substrate W may be supported by only thesecond support member 52 and the cleaned substrate W be supported byonly the first support member 51. Similarly with the embodiments shownin FIGS. 5, 8, and 11, the substrate transfer apparatus may beconstructed as follows. A depressurizing chamber acting as adepressurizing section is provided below each of the first supportmember 51 and second support member 52 (instead of the fluid reservoirs53 and 54 acting as pressure adjusting sections). In a state where thedepressurizing chamber below the first support member 51 isdepressurized, the second support member 52 is higher than the firstsupport member 51, whereas in a state where the depressurizing chamberbelow the second support member 52 is depressurized, the first supportmember 51 is higher than the second support member 52.

FIG. 14 illustrates an embodiment where a set of a first suction pad 71and a second suction pad 72 is provided in three or more places on thetop face of the arm 21. The first suction pad 71 and second suction pad72 are supported by lift units 73 and 74, respectively.

FIG. 15 shows an embodiment where the lift units 73 and 74 areconstructed by cylinders 75 and 76, such as pneumatic cylinders orhydraulic cylinders. In this embodiment, when an uncleaned substrate Wis transferred while being kept on the arm 21, the expansion of thecylinder 75 causes the first suction pad 71 to rise, making the firstsuction pad 71 higher than the second suction pad 72, as shown in FIG.16. As a result, the bottom surface of the substrate W is sucked by onlythe first suction pad 71. When the cleaned substrate W is transferred,the expansion of the cylinder 76 causes the second suction pad 72 torise, making the second suction pad 72 higher than the first suction pad71. As a result, the bottom surface of the substrate W is sucked by onlythe second suction pad 72.

FIG. 18 shows an embodiment where the lift units 73 and 74 areconstructed by bag members 77 and 78 which are provided between the arm21 and the first suction pad 71 and second suction pad 72 and expand asa result of a selective supply of fluid from a pump, thereby raising thefirst suction pad 71 and second suction pad 72. As shown in FIG. 19,each of the bag members 77 and 78 takes the form of a sealed bag havingan opening section 79 in the middle. The bag members 77 and 78 areexpanded by introducing, for example, air from their inlets 80. In theembodiment, when an uncleaned substrate W is transferred while beingkept on the arm 21, the supply of fluid to the bag member 77 expands thebag member 77, causing the first suction pad 71 to rise, which makes thefirst suction pad 71 higher than the second suction pad 72, as shown inFIG. 20. As a result, the bottom surface of the substrate W is sucked byonly the first suction pad 71. When the cleaned substrate W istransferred, the supply of fluid to the bag member 78 expands the bagmember 78, causing the second suction pad 72 to rise, which makes thesecond suction pad 72 higher than the first suction pad 71, as shown inFIG. 21. As a result, the bottom surface of the substrate W is sucked byonly the second suction pad 72.

FIG. 22 shows an embodiment where the lift units 73 and 74 areconstructed by strap members 87 and 88 which are provided below thefirst suction pad 71 and second suction pad 72 and are strained as aresult of the contraction of cylinders 85 and 86, thereby causing thefirst suction pad 71 and second suction pad 72 to rise. In FIG. 22, bothof the cylinders 85 and 86 expand, relaxing both of the strap members 87and 88, which allows both of the first suction pad 71 and second suctionpad 72 to go down by their own weight. In the embodiment, when anuncleaned substrate W is transferred while being kept on the arm 21, thecontraction of the cylinder 85 strains the strap member 87 to raise thefirst suction pad 71, making the first suction pad 71 higher than thesecond suction pad 72, as shown in FIG. 23. As a result, the bottomsurface of the substrate W is sucked by only the first suction pad 71.When the cleaned substrate W is transferred, the contraction of thecylinder 86 strains the strap member 88 to raise the second suction pad72, making the second suction pad 72 higher than the first suction pad71, as shown in FIG. 24. As a result, the bottom surface of thesubstrate W is sucked by only the second suction pad 72.

FIG. 25 shows an embodiment where the lift units 73 and 74 areconstructed by a belt 90 provided below the first suction pad 71 andsecond suction pad 72. The belt 90 is stretched over a driving roller 91and a driven roller 92 both installed on the arm 21 and circulatesaround them. The belt 90 is provided with a thick section 93 relativelythicker than the other portions. As the belt 90 circulates, the belt 90switches between a state where the thick section 93 gets under the firstsuction pad 71 to raise the first suction pad 71 and a state where thethick section 93 gets under the second suction pad 72 to raise thesecond suction pad 72. In the embodiment, when an uncleaned substrate Wis transferred while being kept on the arm 21, the thick section 93 isforced to get under the first suction pad 71 to raise the first suctionpad 71, making the first suction pad 71 higher than the second suctionpad 71, as shown in FIG. 26. As a result, the bottom surface of thesubstrate W is sucked by only the first suction pad 71. When the cleanedsubstrate W is transferred, the thick section 93 is forced to get underthe second suction pad 72 to raise the second suction pad 72, making thesecond suction pad 72 higher than the first suction pad 72, as shown inFIG. 27. As a result, the bottom surface of the substrate W is sucked byonly the second suction pad 72.

With the embodiments shown in FIGS. 15, 18, 22, and 25, too, thecontaminants stuck from the uncleaned substrate W to the first suctionpad 71 are prevented from sticking to the cleaned substrate W again byswitching the suction member that sucks the bottom surface of thesubstrate W from the first suction pad 71 to the second suction pad 72after the cleaning. The substrate transfer apparatus may be constructedin such a manner that an uncleaned substrate W is sucked by only thesecond suction pad 72 and the cleaned substrate W is sucked by only thefirst suction pad 71.

FIG. 28 shows an embodiment where a seesaw-like rocking member 100 isprovided on the top face of the arm 21 and has a first suction pad 101at one end and a second suction pad 102 at the other end. In FIG. 28,although only one rocking member 100, one first suction pad 101, and onesecond suction pad 102 are shown to simplify the explanation, at leastthree sets of the rocking member 100, first suction pad 101, and secondsuction pad 102 are provided on the top face of the arm 21.

The rocking member 100 is provided on a driving shaft 103 rotated by anactuator (not shown). When the rotation of the driving shaft 103 rocksthe rocking member 100 clockwise, this makes the first suction pad 101higher than the second suction pad 102. When the rotation rocks therocking member 100 counterclockwise, this makes the second suction pad102 higher than the first suction pad 101.

In the embodiment, when an uncleaned substrate W is transferred whilebeing kept on the arm 21, the clockwise rocking of the rocking member100 makes the first suction pad 101 higher than the second suction pad102, as shown in FIG. 29. As a result, the bottom surface of thesubstrate W is sucked by only the first suction pad 101. When thecleaned substrate W is transferred, the counterclockwise rocking of therocking member 100 makes the second suction pad 102 higher than thefirst suction pad 101. As a result, the bottom surface of the substrateW is sucked by only the second suction pad 102. As described above, thecontaminants stuck from the uncleaned substrate W to the first suctionpad 101 are prevented from sticking to the cleaned substrate W again byswitching the suction member that sucks to the bottom surface of thesubstrate W from the first suction pad 101 to the second suction pad 102after the cleaning.

The substrate transfer apparatus may be constructed in such a mannerthat an uncleaned substrate W is sucked by only the second suction pad102 and the cleaned substrate W is sucked by only the first suction pad101. With this configuration, too, the contaminants will be preventedfrom sticking to the cleaned substrate again.

FIGS. 31 and 32 show an embodiment where the rocking member 100 isrocked by the pull strength of a spring 106 and a wedge member 108 thatgets under the other end of the rocking member 100 as a result of theexpansion of a cylinder 107. As with the embodiment explained in FIG.28, the first suction pad 101 is provided at one end of the rockingmember 100 and the second suction pad 102 is provided at the other end.

In the embodiment, when an uncleaned substrate W is transferred whilebeing kept on the arm 21, the contraction of the cylinder 107 removesthe wedge member 108 from under the other end of the rocking member 100,allowing the pull strength of the spring 106 to rock the rocking member100 clockwise, which makes the first suction pad 101 higher than thesecond suction pad 102, as shown in FIG. 31. As a result, the bottomsurface of the substrate W is sucked by only the first suction pad 101.When the cleaned substrate W is transferred, the expansion of thecylinder 107 forces the wedge member 108 to get under the other end ofthe rocking member 100, rocking the rocking member 100 counterclockwiseagainst the pull strength of the spring 106, which makes the secondsuction pad 102 higher than the first suction pad 101. As a result, thebottom surface of the substrate W is sucked by only the second suctionpad 102. With the embodiment, too, contaminants stuck from an uncleanedsubstrate W are prevented from sticking to the cleaned substrate Wagain.

As explained in FIGS. 28 to 32, with the configuration where the rockingof the rocking member 100 switches between the suction by the firstsuction pad 101 and the suction by the second suction pad 101, when thetops of the first suction pad 101 and second suction pad 102 are taperedin such a manner that the outer edge is lower than the inner edge asshown in the figure, this improves the suction properties between thetop of each pad and the bottom surface of the substrate W.

FIG. 33 shows an embodiment where a seesaw-like rocking member 110 isprovided on the top face of the arm 21 and has a first support member111 at one end and a second support member 112 at the other end.Although only one rocking member 110, one first support member 111, andone second support member 112 are shown to simplify the explanation, atleast three sets of the rocking member 110, first support member 111 andsecond support member 112 are provided on the top face of the arm 21.

The rocking member 110 is provided on a driving shaft 113 rotated by anactuator (not shown). When the rotation of the driving shaft 113 rocksthe rocking member 110 clockwise, this makes the first support member111 higher than the second support member 112. When the rotation rocksthe rocking member 110 counterclockwise, this makes the second supportmember 112 higher than the first member 111.

In the embodiment, when an uncleaned substrate W is transferred whilebeing kept on the arm 21, the clockwise rocking of the rocking member110 makes the first support member 111 higher than the second supportmember 112, as shown in FIG. 34. As a result, the bottom surface of thesubstrate W is supported by only the first support member 111. When thecleaned substrate W is transferred, the counterclockwise rocking of therocking member 110 makes the second support member 112 higher than thefirst support member 111. As a result, the bottom surface of thesubstrate W is supported by only the second support member 112. Asdescribed above, the contaminants stuck from the uncleaned substrate Wto the first support member 111 are prevented from sticking to thecleaned substrate W again by switching the support member that supportsthe bottom surface of the substrate W from the first support member 111to the second support member 112 after the cleaning.

The substrate transfer apparatus may be constructed in such a mannerthat an uncleaned substrate W is supported by only the second supportmember 112 and the cleaned substrate W is supported by only the firstsupport member 111. With this configuration, too, contaminants will beprevented from sticking to the cleaned substrate again.

FIG. 36 shows an embodiment where one of a first support member 121 anda second support member 122 both provided on the top face of the arm 21is designed to go up and down freely. In the embodiment, the firstsupport member 121 is designed to go up and down freely and secondsupport members 122 constructed by projections fixed to the top face ofthe arm 21 are provided on both sides of the first support member 121.In the example shown in the figure, the first support member 121 is madeup of a suction pad. A circuit 123 is connected to the first supportmember 121. As described later, the bottom surface of the substrate Wabove the first support member 121 can be sucked by sucking through thecircuit 123. The first support member 121 constructed by a suction padis supported at the top face of a diaphragm 125. Under the bottom faceof the diaphragm 125, a pressure adjusting chamber 126 is formed. Acircuit 127 is connected to the pressure adjusting chamber 126. Asdescribed later, the supply of compressed air from a pump 128 to thepressure adjusting chamber 126 via the circuit 127 causes the diaphragm125 to expand upward, raising the first support member 121, whereas thedepressurization of the pressure adjusting chamber 126 via the circuit127 causes the diaphragm 125 to dent downward, permitting the firstsupport member 121 to go down. Although FIG. 36 shows only one firstsupport member 121 and only two second support members 122 on both sidesof the first support member to simplify the explanation, at least threesets of the first support member 121 and two second support members 122are provided on the top face of the arm 21.

In the embodiment, when an uncleaned substrate W is transferred whilebeing kept on the arm 21, the supply of compressed air to the pressureadjusting chamber 126 via the circuit 127 causes the diaphragm 125 toexpand upward, raising the first support member 121, as shown in FIG.37. As a result, the first support member 121 is higher than the secondsupport members 122, which allows the bottom surface of the substrate Wto be supported by only the first support member 121. In this case, thesuction through the circuit 123 causes the bottom surface of thesubstrate W to be sucked by the first support member 121 constructed bya suction pad.

When the cleaned substrate W is transferred, the depressurization of thepressure adjusting chamber 126 via the circuit 127 causes the diaphragm125 to dent downward, permitting the first support member 121 to godown. As a result, the first support member 121 is lower than the secondsupport members 122, which allows the bottom surface of the substrate Wto be supported by only the second support members 122. In this case,sucking is not done via the circuit 123.

With the embodiment of FIG. 36, too, the contaminants stuck from theuncleaned substrate W to the first support member 121 are prevented fromsticking to the cleaned substrate W again by switching the supportmember that supports the bottom surface of the substrate W from thefirst support member 121 to the second support member 122 after thecleaning. Although the first support member 121 has been designed to goup and down freely and the second support members 122 have been fixed onthe top face of the arm 21, the second support members 122 may bedesigned to go up and down freely and the first support member 121 maybe fixed on the top face of the arm 21. Moreover, an uncleaned substrateW may be supported by only the second support members 122 and thecleaned substrate W may be supported by only the first support member121.

FIG. 39 shows a modification of the embodiment explained in FIG. 36. Inthe modification, when the pressure adjusting chamber 126 below thefirst support member 121 is not depressurized, the first support member121 is higher than the second support members 122, whereas when thepressure adjusting chamber 126 is depressurized, the first supportmember 121 is lower than the second support members 122. With themodification, when an uncleaned substrate W is transferred while beingkept on the arm 21, depressurization is not effected through the circuit127 as shown in FIG. 39. As a result, the first support member. 121 ishigher than the second support members 122, which allows the bottomsurface of the substrate W to be supported by the first support member121. The suction through the circuit 123 causes the first support member121 constructed by a suction pad to suck the bottom surface of thesubstrate W. When the cleaned substrate W is transferred, the pressureadjusting chamber 126 is depressurized through the circuit 127, dentingthe diaphragm 125 downward as shown in FIG. 40. This causes the firstsupport member 121 to go down, making the first support member 121 lowerthan the second support members 122, which allows the bottom surface ofthe substrate W to be supported by the second support members 122. Inthis case, suction through the circuit 123 is not effected. With themodification of FIG. 39, too, the contaminants stuck from the uncleanedsubstrate W to the first support member 121 are prevented from stickingto the cleaned substrate W again by switching the support member thatsupports the bottom surface of the substrate W from the first supportmember 121 to the second support member 122 after the cleaning. Thesecond support members 122 may be designed to go up and down freely andthe first support member 121 may be fixed on the top face of the arm 21.Moreover, in the modification, an uncleaned substrate W may be supportedby only the second support members 122 and the cleaned substrate W maybe supported by only the first support member 121.

FIG. 41 shows another modification of the embodiment explained in FIG.36. In the modification, when the pressure adjusting chamber 126 belowthe first support member 121 is not pressurized, the first supportmember 121 is lower than the second support members 122, whereas whenthe supply of high-pressure air to the pressure adjusting chamber 126expands the diaphragm 125 upward, the first support member 121 is higherthan the second support members 122. With the modification, when anuncleaned substrate W is transferred while being kept on the arm 21, thesupply of high-pressure air to the pressure adjusting chamber 126 viathe circuit 127 expands the diaphragm 125 upward as shown in FIG. 42. Asa result, the first support member 121 is higher than the second supportmembers 122, which allows the bottom surface of the substrate W to besupported by only the first support member 121. The suction through thecircuit 123 causes the first support member 121 constructed by a suctionpad to suck the bottom surface of the substrate W. When the cleanedsubstrate W is transferred, high-pressure air is not supplied throughthe circuit 127 as shown in FIG. 41. As a result, the first supportmember 121 is lower than the second support members 122, which allowsthe bottom surface of the substrate W to be supported by only the secondsupport members 122. In this case, suction through the circuit 123 isnot effected. With the modification of FIG. 41, too, the contaminantsstuck from the uncleaned substrate W to the first support member 121 areprevented from sticking to the cleaned substrate W again by switchingthe support member that supports the bottom surface of the substrate Wfrom the first support member 121 to the second support member 122 afterthe cleaning. In the modification, the second support members 122 may bedesigned to go up and down freely and the first support member 121 maybe fixed on the top face of the arm 21. Moreover, an uncleaned substrateW may be supported by only the second support members 122 and thecleaned substrate W may be supported by only the first support member121.

Although the embodiments of the present invention have been explainedusing the cleaning machine 1 for cleaning substrates W, the substratetransfer apparatus of the invention may be applied to various processingsystems which perform other processes, such as drying substrates orapplying a resist film on a substrate.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1. A substrate transfer method of transferring a substrate supported bya moving arm to a processing machine, the method comprising: disposingon a top surface of the arm a plurality of support sets each including afirst support member and a second support member to support thesubstrate, the first support member being formed of a suction padsupported on a top surface of a diaphragm and the second support memberbeing formed of projections fixed on the top face of the arm; supplyingfluid under the diaphragm to support the substrate with the firstsupport member rising due to upward expansion of the diaphragm whenloading the substrate into the processing machine, and depressurizingunder the diaphragm to support the substrate with the second supportmember due to a downward dent of the diaphragm when unloading thesubstrate from the processing machine.
 2. The method according to claim1, wherein the processing machine is a cleaning machine for cleaning asubstrate.